Low temperature LPCVD SiN direct bonding for sensors
Conference Paper
(2005)
Author(s)
CL Hsu (External organisation)
Grégory Pandraud (TU Delft - Electronic Instrumentation)
JF Creemer (TU Delft - QN/High Resolution Electron Microscopy)
P. J. French (TU Delft - Electronic Instrumentation)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:0b67e414-b841-4522-81dd-55adff5b07a8
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Publication Year
2005
Research Group
Electronic Instrumentation
Pages (from-to)
162-166
ISBN (print)
90-73461-50-2
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