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Conference paper (3)

3 records found

1

Direct wafer bonding of processed LPCVD silicon nitride films

Conference paper (2006) - CL Hsu (author) , JF Creemer (author) , G. Pandraud (author) , J.C. Wolff (author) , B. J. Thijsse (author) , Pasqualina Maria Sarro (author) , Paddy French (author)

Direct bonding of processed LPCVD silicon nitride films (U-SP-2-I-ICT)

Conference paper (2006) - G. Pandraud (author) , Paddy French (author) , CL Hsu (author) , JF Creemer (author) , J.C. Wolff (author) , B. J. Thijsse (author) , Pasqualina Maria Sarro (author)

Low temperature LPCVD SiN direct bonding for sensors

Conference paper (2005) - CL Hsu (author) , G Pandraud (author) , J.F. Creemer (author) , P. J. French (author) , PM Sarro (author)