CL Hsu | TU Delft Repository

CH

CL Hsu

Conference paper (3)

3 records found

1

Direct bonding of processed LPCVD silicon nitride films (U-SP-2-I-ICT)

Conference paper (2006) - G. Pandraud (author), P.J. French (author), CL Hsu (author), J.F. Creemer (author), J.C. Wolff (author), B.J. Thijsse (author), Pasqualina M Sarro (author)

Direct wafer bonding of processed LPCVD silicon nitride films

Conference paper (2006) - CL Hsu (author), J.F. Creemer (author), G. Pandraud (author), J.C. Wolff (author), B.J. Thijsse (author), Pasqualina M Sarro (author), P.J. French (author)

Low temperature LPCVD SiN direct bonding for sensors

Conference paper (2005) - CL Hsu (author), G. Pandraud (author), J.F. Creemer (author), P.J. French (author), Pasqualina M Sarro (author)