Direct bonding of processed LPCVD silicon nitride films (U-SP-2-I-ICT)

Conference Paper (2006)
Author(s)

G Pandraud (TU Delft - QN/High Resolution Electron Microscopy)

P. J. French (TU Delft - Electronic Instrumentation)

CL Hsu (External organisation)

J.F. Creemer (TU Delft - Old - EWI Sect. ECTM)

J.C. Wolff (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

B.J. Thijsse (TU Delft - OLD Virtual Materials and Mechanics)

PM Sarro (TU Delft - Electronic Components, Technology and Materials)

Research Group
QN/High Resolution Electron Microscopy
More Info
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Publication Year
2006
Research Group
QN/High Resolution Electron Microscopy
Pages (from-to)
1-4
ISBN (print)
9780854328482

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