Direct bonding of processed LPCVD silicon nitride films (U-SP-2-I-ICT)
Conference Paper
(2006)
Author(s)
G Pandraud (TU Delft - QN/High Resolution Electron Microscopy)
P. J. French (TU Delft - Electronic Instrumentation)
CL Hsu (External organisation)
J.F. Creemer (TU Delft - Old - EWI Sect. ECTM)
J.C. Wolff (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
B.J. Thijsse (TU Delft - OLD Virtual Materials and Mechanics)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
QN/High Resolution Electron Microscopy
To reference this document use:
https://resolver.tudelft.nl/uuid:abb279ad-a9aa-428d-947e-26087f04c8f9
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Publication Year
2006
Research Group
QN/High Resolution Electron Microscopy
Pages (from-to)
1-4
ISBN (print)
9780854328482
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