Direct wafer bonding of processed LPCVD silicon nitride films
Conference Paper
(2006)
Authors
CL Hsu (External organisation)
Fredrik Creemer (Old - EWI Sect. ECTM)
Grégory Pandraud (QN/High Resolution Electron Microscopy)
Jan Cornelis Wolff (Old - EWI Ch. Integrated Sensing Devices)
BJ Thijsse (OLD Virtual Materials and Mechanics)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
P.J. French (TU Delft - Electronic Instrumentation)
Research Group
Old - EWI Sect. ECTM
To reference this document use:
https://resolver.tudelft.nl/8f27a846-77b0-424c-a899-6e5a30db6ee9
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Publication Year
2006
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
89-92
ISBN (print)
085432-648-3
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