Direct wafer bonding of processed LPCVD silicon nitride films

Conference Paper (2006)
Authors

CL Hsu (External organisation)

Fredrik Creemer (Old - EWI Sect. ECTM)

Grégory Pandraud (QN/High Resolution Electron Microscopy)

Jan Cornelis Wolff (Old - EWI Ch. Integrated Sensing Devices)

BJ Thijsse (OLD Virtual Materials and Mechanics)

P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)

P.J. French (TU Delft - Electronic Instrumentation)

Research Group
Old - EWI Sect. ECTM
More Info
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Publication Year
2006
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
89-92
ISBN (print)
085432-648-3

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