Direct wafer bonding of processed LPCVD silicon nitride films

CL Hsu (External organisation)

Fredrik Creemer (Old - EWI Sect. ECTM)

Grégory Pandraud (QN/High Resolution Electron Microscopy)

Jan Cornelis Wolff (Old - EWI Ch. Integrated Sensing Devices)

BJ Thijsse (OLD Virtual Materials and Mechanics)

P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)

P.J. French (TU Delft - Electronic Instrumentation)