Contoured thermal V-beam actuator with improved temperature uniformity
Journal Article
(2008)
Author(s)
WP Sassen (TU Delft - Micro and Nano Engineering)
VA Henneken (TU Delft - Micro and Nano Engineering)
Marcel Tichem (TU Delft - Micro and Nano Engineering)
Pasqualina Maria Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Micro and Nano Engineering
To reference this document use:
https://resolver.tudelft.nl/uuid:0b6c6b3e-7951-426a-ac58-c33f8680d043
More Info
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Publication Year
2008
Research Group
Micro and Nano Engineering
Volume number
144
Pages (from-to)
341-347
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