Tuning the Q -factor of nanomechanical string resonators by torsion support design
Z. Li (TU Delft - Dynamics of Micro and Nano Systems)
M. Xu (Kavli institute of nanoscience Delft, TU Delft - QN/Groeblacher Lab)
R. A. Norte (TU Delft - QN/Groeblacher Lab, Kavli institute of nanoscience Delft, TU Delft - Dynamics of Micro and Nano Systems)
AM Aragon (TU Delft - Computational Design and Mechanics)
F Van Keulen (TU Delft - Mechanical Engineering)
Farbod Alijani (TU Delft - Dynamics of Micro and Nano Systems)
Peter Steeneken (TU Delft - Dynamics of Micro and Nano Systems, TU Delft - QN/Steeneken Lab, Kavli institute of nanoscience Delft)
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Abstract
In recent years, the Q-factor of Si 3 N 4 nanomechanical resonators has significantly been increased by soft-clamping techniques using large and complex support structures. To date, however, obtaining similar performance with smaller supports has remained a challenge. Here, we make use of torsion beam supports to tune the Q-factor of Si 3 N 4 string resonators. By design optimization of the supports, we obtain a 50% Q-factor enhancement compared to the standard clamped-clamped string resonators. By performing experimental and numerical studies, we show that further improvement of the Q-factor is limited by a trade-off between maximizing stress and minimizing torsional support stiffness. Thus, our study also provides insight into dissipation limits of high-stress string resonators and outlines how advanced designs can be realized for reaching ultimate f 0 × Q product while maintaining a small footprint.
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