Experimental evaluation of robust-control-relevance: a confrontation with a next-generation wafer stage
Conference Paper
(2010)
Author(s)
R.A.P. van Herpen (TU Delft - Building Physics)
Tom Oomen (External organisation)
M van de Wal (TU Delft - Old - WbMT)
O.H. Bosgra (TU Delft - DISC)
Research Group
Building Physics
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https://resolver.tudelft.nl/uuid:0dcf64af-9b0e-48c3-98d3-dfc862d23eca
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Publication Year
2010
Language
English
Research Group
Building Physics
Pages (from-to)
3493-3499
ISBN (print)
978-1-4244-7425-7
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