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M van de Wal

Conference paper (2)

Journal article (2)

4 records found

1

Next-Generation Wafer Stage Motion Control: Connecting System Identification and Robust Control

Conference paper (2012) - Tom Oomen (author) , R.A.P. van Herpen (author) , S Quist (author) , M van de Wal (author) , Okko Bosgra (author) , M Steinbuch (author)

Experimental evaluation of robust-control-relevance: a confrontation with a next-generation wafer stage

Conference paper (2010) - R.A.P. van Herpen (author) , T Oomen (author) , M van de Wal (author) , Okko Bosgra (author)

Nominal and robust feedforward design with time domain constraints applied to a wafer stage

Journal article (2006) - E. de Gelder (author) , M van de Wal (author) , Carsten Scherer (author) , CWJ Hol (author) , O.H. Bosgra (author)

Multivariable feedback control design for high-precision wafer stage motion

Journal article (2002) - M van de Wal (author) , G van Baars (author) , F Sperling (author) , Okko Bosgra (author)