Nominal and robust feedforward design with time domain constraints applied to a wafer stage
Journal Article
(2006)
Author(s)
E. de Gelder (External organisation)
M van de Wal (TU Delft - Old - WbMT)
Carsten Scherer (TU Delft - DISC)
CWJ Hol (TU Delft - DISC)
OH Bosgra (TU Delft - DISC)
Research Group
Old - WbMT
To reference this document use:
https://resolver.tudelft.nl/uuid:47b0b5b7-bb1e-40b0-9b96-8f0efaac1494
More Info
expand_more
expand_more
Publication Year
2006
Research Group
Old - WbMT
Issue number
2
Volume number
128
Pages (from-to)
204-215
No files available
Metadata only record. There are no files for this record.