Next-Generation Wafer Stage Motion Control: Connecting System Identification and Robust Control
Conference Paper
(2012)
Author(s)
Tom Oomen (External organisation)
R.A.P. van Herpen (TU Delft - Building Physics)
S Quist (External organisation)
M van de Wal (TU Delft - Old - WbMT)
OH Bosgra (TU Delft - DISC)
M. Steinbuch (External organisation)
Research Group
Building Physics
To reference this document use:
https://resolver.tudelft.nl/uuid:99c4e3e3-7dab-4ad8-bacf-c1b02d116c08
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Publication Year
2012
Research Group
Building Physics
Pages (from-to)
2455-2460
ISBN (print)
978-4577-1094-0
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