Next-Generation Wafer Stage Motion Control: Connecting System Identification and Robust Control

Conference Paper (2012)
Author(s)

Tom Oomen (External organisation)

R.A.P. van Herpen (TU Delft - Building Physics)

S Quist (External organisation)

M van de Wal (TU Delft - Old - WbMT)

OH Bosgra (TU Delft - DISC)

M. Steinbuch (External organisation)

Research Group
Building Physics
More Info
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Publication Year
2012
Research Group
Building Physics
Pages (from-to)
2455-2460
ISBN (print)
978-4577-1094-0

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