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Conference paper (2)

2 records found

1

Next-Generation Wafer Stage Motion Control: Connecting System Identification and Robust Control

Conference paper (2012) - Tom Oomen (author) , R.A.P. van Herpen (author) , S Quist (author) , M van de Wal (author) , Okko Bosgra (author) , M Steinbuch (author)

Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage

Conference paper (2010) - T Oomen (author) , S Quist (author) , R.A.P. van Herpen (author) , O.H. Bosgra (author)