Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage
Conference Paper
(2010)
Author(s)
Tom Oomen (External organisation)
S Quist (External organisation)
R.A.P. van Herpen (TU Delft - Building Physics)
Okko Bosgra (TU Delft - DISC)
Research Group
Building Physics
To reference this document use:
https://resolver.tudelft.nl/uuid:3d2f72ab-dded-4664-8b9c-ad512a7a5ea0
More Info
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Publication Year
2010
Language
English
Research Group
Building Physics
Pages (from-to)
5530-5535
ISBN (print)
978-1-4244-7744-9
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