Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage

Conference paper (2010)

Authors

Tom Oomen External organisation
S Quist External organisation
R.A.P. van Herpen Building Physics - Architecture and the Built Environment
O.H. Bosgra DISC - Mechanical, Maritime and Materials Engineering
Research Group
Building Physics (Architecture and the Built Environment) (TU Delft)
More Info
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Published Date

2010

Language

English

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Faculty

Architecture and the Built Environment

Department

Architectural Engineering +Technology

Research Group

Building Physics