Multivariable feedback control design for high-precision wafer stage motion
Journal Article
(2002)
Author(s)
M van de Wal (TU Delft - Old - WbMT)
G van Baars (External organisation)
F Sperling (External organisation)
O.H. Bosgra (TU Delft - DISC)
Research Group
Old - WbMT
To reference this document use:
https://resolver.tudelft.nl/uuid:795a363d-90de-40dc-abcd-9c8d03ce9168
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Publication Year
2002
Research Group
Old - WbMT
Volume number
10
Pages (from-to)
739-755
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