High brightness 100-electron-beam-source for high resolution applications
Journal Article
(2007)
Author(s)
Y Zhang (TU Delft - ImPhys/Charged Particle Optics)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:0e15b75d-e819-441d-9520-08ce213c84c2
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Publication Year
2007
Research Group
ImPhys/Charged Particle Optics
Issue number
6
Volume number
25
Pages (from-to)
2239-2244
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