High brightness 100-electron-beam-source for high resolution applications

Journal article (2007)

Authors

Y Zhang ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

2007

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics