7 records found
1
A 100-electron-beam source from a high brightness Schottky emitter for fast patterning applications
Design of a high brightness multi-electron beam source
Electron optics of microlenses with inclined beams
High brightness 100-electron-beam-source for high resolution applications
Thermal Model of Miniaturized Schottky Emitter for Parallel Electron Beam Lithography
Integrated Multi-electron-beam blanker array for sub-10-nm electron beam induced deposition
Multibeam Electron Source using MEMS Electron Optical Components
