Y Zhang

Conference paper (1)

Doctoral thesis (1)

Journal article (5)

7 records found

A 100-electron-beam source from a high brightness Schottky emitter for fast patterning applications

Doctoral thesis (2008) - Y Zhang (author) , P. Kruit (promotor)

Design of a high brightness multi-electron beam source

Conference paper (2008) - Y Zhang (author) , Pieter Kruit (author)

Electron optics of microlenses with inclined beams

Thermal Model of Miniaturized Schottky Emitter for Parallel Electron Beam Lithography

High brightness 100-electron-beam-source for high resolution applications

Journal article (2007) - Y Zhang (author) , Pieter Kruit (author)

Integrated Multi-electron-beam blanker array for sub-10-nm electron beam induced deposition

Multibeam Electron Source using MEMS Electron Optical Components