A 100-electron-beam source from a high brightness Schottky emitter for fast patterning applications
Doctoral Thesis
(2008)
Author(s)
Y Zhang (TU Delft - ImPhys/Charged Particle Optics)
Contributor(s)
P Kruit – Promotor
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:13c036f5-ea96-4404-b4c0-adefb2faf482
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Publication Year
2008
Research Group
ImPhys/Charged Particle Optics
ISBN (print)
978-90-9023706-0
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