Multibeam Electron Source using MEMS Electron Optical Components
Journal Article
(2006)
Author(s)
B van Someren (TU Delft - ImPhys/Charged Particle Optics)
MJ van Bruggen (TU Delft - ImPhys/Charged Particle Optics)
Y Zhang (TU Delft - ImPhys/Charged Particle Optics)
Kees C.W. Hagen (TU Delft - ImPhys/Charged Particle Optics)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:064cd881-473a-40e3-acfb-c9443db84950
More Info
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Publication Year
2006
Research Group
ImPhys/Charged Particle Optics
Issue number
34
Volume number
C. Series
Pages (from-to)
1092-1097
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