Thermal Model of Miniaturized Schottky Emitter for Parallel Electron Beam Lithography
Journal Article
(2007)
Author(s)
AK Dokania (TU Delft - ImPhys/Charged Particle Optics)
JFM Velthuis (External organisation)
Y Zhang (TU Delft - ImPhys/Charged Particle Optics)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:cdb2bbdb-2348-478c-a2bc-6c0fbcedd9c5
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Publication Year
2007
Research Group
ImPhys/Charged Particle Optics
Issue number
2
Volume number
25
Pages (from-to)
504-507
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