Thermal Model of Miniaturized Schottky Emitter for Parallel Electron Beam Lithography

Journal article (2007)

Authors

AK Dokania ImPhys/Charged Particle Optics
JFM Velthuis External organisation
Y Zhang ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

2007

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics