Integrated Multi-electron-beam blanker array for sub-10-nm electron beam induced deposition
Journal Article
(2006)
Author(s)
Y Zhang (TU Delft - ImPhys/Charged Particle Optics)
C.T.H. Heerkens (TU Delft - ImPhys/Charged Particle Optics)
MJ van Bruggen (TU Delft - ImPhys/Charged Particle Optics)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:95206e8b-4262-49a3-b0c1-ca9ea0816028
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Publication Year
2006
Research Group
ImPhys/Charged Particle Optics
Issue number
6
Volume number
24
Pages (from-to)
2857-2860
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