A novel mixing surface acoustic wave device for liquid sensing applications

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A novel mixing surface acoustic wave device for liquid sensing applications

Conference Paper (2016)

Author(s)

Thu Hang Bui (TU Delft - Electronic Components, Technology and Materials)

Bruno Morana (TU Delft - EKL-Users)

Tom Scholtes (TU Delft - EKL Processing)

Trinh Chu Duc (Hanoi University of Engineering and Technology)

Lina Sarro (TU Delft - Electronic Components, Technology and Materials)

Sensors Piezoelectric transducers Acoustic waves Liguids Surface acoustic wave devices Aluminium nitride

DOI related publication

https://doi.org/10.1109/MEMSYS.2016.7421736 Final published version

To reference this document use

https://resolver.tudelft.nl/uuid:0f355055-0368-44fa-b12b-44faa05c1c66

More Info

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Publication Year

2016

Language

English

Pages (from-to)

745-748

ISBN (electronic)

978-1-5090-1973-1

Event

Downloads counter

183

Abstract

This paper presents a novel mixing surface acoustic wave (M-SAW) device using multiple Aluminum (Al) interdigital transducer (IDT) layers for liquid sensing applications. The stronger mechanical wave beam generated by the multiple input-IDT layers on the thin film (1 μm) Aluminum Nitride (AlN), consists of different-phase acoustic waves that can travel through a liquid medium. In contrast to the whole signal leaking into liquid medium as in typical SAW devices, the signal obtained at the receiver of the M-SAW device only has a decline in the Rayleigh component. The experimental results show that it is possible to interact with the liquid medium placed on the surface and extract information about the liquid volume based on the phase change. Phase shifts of -16.35°, -11.23°, -4.84°, and -0.86° are obtained for different volumes of demi-water after 10 seconds, 2, 4 and 5 minutes of vaporization, respectively.