This paper presents a novel mixing surface acoustic wave (M-SAW) device using multiple Aluminum (Al) interdigital transducer (IDT) layers for liquid sensing applications. The stronger mechanical wave beam generated by the multiple input-IDT layers on the thin film (1 μm) Aluminum Nitride (AlN), consists of different-phase acoustic waves that can travel through a liquid medium. In contrast to the whole signal leaking into liquid medium as in typical SAW devices, the signal obtained at the receiver of the M-SAW device only has a decline in the Rayleigh component. The experimental results show that it is possible to interact with the liquid medium placed on the surface and extract information about the liquid volume based on the phase change. Phase shifts of -16.35°, -11.23°, -4.84°, and -0.86° are obtained for different volumes of demi-water after 10 seconds, 2, 4 and 5 minutes of vaporization, respectively.

This work presents the mixing wave generation of a novel surface acoustic wave (M-SAW) device for sensing in liquids. Two structures are investigated: One including two input and output interdigital transducer (IDT) layers and the other including two input and one output IDT layers. In both cases, a thin (1 μm) piezoelectric AlN layer is in between the two patterned IDT layers. These structures generate longitudinal and transverse acoustic waves with opposite phase which are separated by the film thickness. A 3-dimensional M-SAW device coupled to the finite element method is designed to study the mixing acoustic wave generation propagating through a delay line. The investigated configuration parameters include the number of finger pairs, the piezoelectric cut profile, the thickness of the piezoelectric substrate, and the operating frequency. The proposed structures are evaluated and compared with the conventional SAW structure with the single IDT layer patterned on the piezoelectric surface. The wave displacement along the propagation path is used to evaluate the amplitude field of the mixing longitudinal waves. The wave displacement along the AlN depth is used to investigate the effect of the bottom IDT layer on the transverse component generated by the top IDT layer. The corresponding frequency response, both in simulations and experiments, is an additive function, consisting of sinc(X) and uniform harmonics. The M-SAW devices are tested to assess their potential for liquid sensing, by dropping liquid medium in volumes between 0.05 and 0.13 μl on the propagation path. The interaction with the liquid medium provides information about the liquid, based on the phase attenuation change. The larger the droplet volume is, the longer the duration of the phase shift to reach stability is. The resolution that the output change of the sensor can measure is 0.03 μl.