Direct spray coating of photoresist - a new method for patterning 3-D structures

PN Pham (TU Delft - Electronic Components, Technology and Materials)

TLM Scholtes (TU Delft - Electronic Components, Technology and Materials)

R Klerks (TU Delft - Electronic Components, Technology and Materials)

E Boellaard (TU Delft - Electronic Components, Technology and Materials)

PM Sarro (TU Delft - Electronic Components, Technology and Materials)

JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)