Direct spray coating of photoresist - a new method for patterning 3-D structures
Conference Paper
(2002)
Author(s)
PN Pham (TU Delft - Electronic Components, Technology and Materials)
T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)
R. Klerks (TU Delft - Electronic Components, Technology and Materials)
E Boellaard (TU Delft - Electronic Components, Technology and Materials)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:dd453072-60d5-49e9-b8fd-1adc28efd8d7
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Publication Year
2002
Research Group
Electronic Components, Technology and Materials
Bibliographical Note
CD-rom@en
Pages (from-to)
182-185
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