Direct spray coating of photoresist - a new method for patterning 3-D structures

Conference paper (2002)

Authors

PN Pham Electronic Components, Technology and Materials -

T.L.M. Scholtes Electronic Components, Technology and Materials -

R. Klerks Electronic Components, Technology and Materials -

E Boellaard Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

JN Burghartz Old - EWI Ch. Integrated Sensing Devices

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

More Info

expand_more

To reference this document use:

http://resolver.tudelft.nl/uuid:dd453072-60d5-49e9-b8fd-1adc28efd8d7

Published Date

2002

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials