Direct spray coating of photoresist - a new method for patterning 3-D structures

PN Pham (TU Delft - Electrical Engineering, Mathematics and Computer Science)

TLM Scholtes (TU Delft - Electrical Engineering, Mathematics and Computer Science)

R Klerks (TU Delft - Electrical Engineering, Mathematics and Computer Science)

E Boellaard (TU Delft - Electrical Engineering, Mathematics and Computer Science)

PM Sarro (TU Delft - Electrical Engineering, Mathematics and Computer Science)

JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)