Location- and orientation-controlled (100) and (110) single-grain Si TFTs without seed substrate

Journal Article (2010)
Author(s)

T Chen (TU Delft - Electronic Components, Technology and Materials)

R Ishihara (TU Delft - Electronic Components, Technology and Materials)

CIM Beenakker (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/TED.2010.2055510
More Info
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
9
Volume number
57
Pages (from-to)
2348-2352

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