Local Rational Modeling for Identification Beyond the Nyquist Frequency
Applied to a Prototype Wafer Stage
Max van Haren (Eindhoven University of Technology)
L. Blanken (Eindhoven University of Technology, Sioux)
Koen Classens (Eindhoven University of Technology)
T.A.E. Oomen (Eindhoven University of Technology, TU Delft - Team Jan-Willem van Wingerden)
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Abstract
Fast-rate models are essential for control design, specifically to address intersample behavior. The aim of this article is to develop a frequency-domain nonparametric identification technique to estimate fast-rate models of systems that have relevant dynamics and allow for actuation above the Nyquist frequency of a slow-rate output. Examples of such systems include vision-in-the-loop systems. Through local rational models over multiple frequency bands, aliased components are effectively disentangled, particularly for lightly damped systems. The developed technique accurately determines nonparametric fast-rate models of systems with slow-rate outputs, all within a single identification experiment. Finally, the effectiveness of the technique is demonstrated through experiments conducted on a prototype wafer stage used for semiconductor manufacturing.