Towards wafer-scale multilayer graphene mems condenser microphones

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doi:10.4233/uuid:134c955a-5604-4bfb-bd3f-433be72a04ec

Towards wafer-scale multilayer graphene mems condenser microphones

Doctoral Thesis (2025)

Author(s)

R. Pezone (TU Delft - Electronic Components, Technology and Materials)

Contributor(s)

PM Sarro – Promotor (TU Delft - Electronic Components, Technology and Materials)

P.G. Steeneken – Promotor (TU Delft - Precision and Microsystems Engineering)

S Vollebregt – Promotor (TU Delft - Electronic Components, Technology and Materials)

Research Group

Electronic Components, Technology and Materials

MEMS Graphene Membrane Microphone

To reference this document use:

https://doi.org/10.4233/uuid:134c955a-5604-4bfb-bd3f-433be72a04ec

More Info

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Publication Year

2025

Language

English

Research Group

Electronic Components, Technology and Materials

ISBN (print)

978-94-6510-663-2

Reuse Rights

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