Experimental study of a shearing interferometer concept of at-wavelenght characterisation of EUV optics.
Journal Article
(2001)
Author(s)
PE Hegeman (External organisation)
XMT Christmann (External organisation)
HM Visser (External organisation)
J.J.M. Braat (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:13775f83-a4f7-41b5-b341-74b721638753
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Publication Year
2001
Research Group
ImPhys/Optics
Volume number
40
Pages (from-to)
4526-4533
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