Nanometer accurate shaping with Fluid Jet Polishing.

Conference Paper (2001)
Author(s)

SM Booij (TU Delft - ImPhys/Optics)

H van Brug (TU Delft - ImPhys/Optics)

M Singh (TU Delft - ImPhys/Optics)

JJM Braat (TU Delft - ImPhys/Optics)

Research Group
ImPhys/Optics
More Info
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Publication Year
2001
Research Group
ImPhys/Optics
Pages (from-to)
222-232

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