Nanometer accurate shaping with Fluid Jet Polishing.
Conference Paper
(2001)
Author(s)
SM Booij (TU Delft - ImPhys/Optics)
H van Brug (TU Delft - ImPhys/Optics)
M Singh (TU Delft - ImPhys/Optics)
JJM Braat (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:15bb58fc-5797-42b2-bdd0-7253c8f508e3
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Publication Year
2001
Research Group
ImPhys/Optics
Pages (from-to)
222-232
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