10 nm lines and spaces written in HSQ using electron beam lithography
Journal Article
(2007)
Author(s)
AE Grigorescu (TU Delft - ImPhys/Charged Particle Optics)
MC Van Der Krogt (TU Delft - QN/Kavli Nanolab Delft)
CW Hagen (TU Delft - ImPhys/Charged Particle Optics)
P Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:15d35c39-53fa-49f8-a9bc-a9e1880a33da
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Publication Year
2007
Research Group
ImPhys/Charged Particle Optics
Volume number
84
Pages (from-to)
822-824
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