Size-dependent effective Young's modulus of silicon nitride cantilevers
Journal Article
(2009)
Author(s)
K Babaei Gavan (TU Delft - QN/Mol. Electronics & Devices)
HJR Westra (TU Delft - QN/Mol. Electronics & Devices)
E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)
W.J. Venstra (TU Delft - QN/Mol. Electronics & Devices)
Herre S J Zant (TU Delft - QN/Mol. Electronics & Devices)
Research Group
QN/Mol. Electronics & Devices
To reference this document use:
https://resolver.tudelft.nl/uuid:162b4834-d7e8-4168-8d37-de2b7a47d744
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Publication Year
2009
Research Group
QN/Mol. Electronics & Devices
Issue number
23
Volume number
94
Pages (from-to)
233108-1-233108-3
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