A MEMS Coriolis-Based Mass-Flow-to-Digital Converter with 100g/h/surdHz Noise i Floor and Zero Stability of pm 0.35mg/h

Conference paper (2022)

Authors

A. Campos de Oliveira Electronic Instrumentation - EEMCS
S. Pan Electronic Instrumentation - EEMCS
K.A.A. Makinwa Microelectronics
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
Copyright: © 2022 A. Campos de Oliveira, S. Pan, K.A.A. Makinwa
DOI: https://doi.org/10.1109/ISSCC42614.2022.9731704
More Info
expand_more

Published Date

2022

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation

Abstract

Flow sensors with high resolution (<200g/h/surdHz) and low offset drift (