A MEMS Coriolis-Based Mass-Flow-to-Digital Converter with 100g/h/surdHz Noise i Floor and Zero Stability of pm 0.35mg/h
A. de Oliveira (TU Delft - Electronic Instrumentation)
S. Pan (TU Delft - Electronic Instrumentation)
K.A.A Makinwa (TU Delft - Microelectronics)
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Abstract
Flow sensors with high resolution (<200g/h/surdHz) and low offset drift (<pm 0.4mg/h) are essential in many microfluidic applications, such as flow cytometry and biological/chemical assays. Although thermal flow sensors can meet these specifications [1], [2], they measure flow velocity, so their calibration is fluid specific. Coriolis flow sensors [3]-[5] are a promising alternative because they measure mass flow and density regardless of fluid type, thus offering more flexibility. However, this has typically been at the expense of lower resolution, offset drift, and large footprint. This paper presents a mass-flow-to-digital converter (phi DC) based on a MEMS Coriolis mass flow sensor and a dedicated readout IC (ROIC). Compared to the state-of-the-art [5], it is more compact and has a digital output. Furthermore, it achieves a 3x improvement in resolution (100 g/h/ surd Hz) and a more than 2 ×improvement in zero stability (pm 0.35mg/h.