Excimer laser crystallization of InGaZnO4 on SiO2 substrate
Journal Article
(2011)
Author(s)
T Chen (TU Delft - Electronic Components, Technology and Materials)
M. Wu (TU Delft - QN/High Resolution Electron Microscopy)
R Ishihara (TU Delft - Electronic Components, Technology and Materials)
K Nomura (External organisation)
T Kamiya (External organisation)
H Hosono (External organisation)
Kees Beenakker (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1007/s10854-011-0347-4
To reference this document use:
https://resolver.tudelft.nl/uuid:16596b60-d005-42bd-bfb5-0a9ad23533d5
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Publication Year
2011
Language
English
Research Group
Electronic Components, Technology and Materials
Volume number
22
Pages (from-to)
1694-1696
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