Atomic layer deposition TiO2 photonic crystal waveguide of biosensors
Conference Paper
(2009)
Author(s)
E Jardinier (TU Delft - Electronic Instrumentation)
Gregory Pandraud (TU Delft - Electronic Instrumentation)
HTM Pham (TU Delft - Old - EWI Sect. ECTM)
Pim J. French (TU Delft - Electronic Instrumentation)
Pasqualina Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/doi:10.1088/1742-6596/187/1/012043
To reference this document use:
https://resolver.tudelft.nl/uuid:1694bb9c-f503-4f55-a592-64b22f7952a9
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Publication Year
2009
Research Group
Electronic Instrumentation
Pages (from-to)
1-4
ISBN (print)
1742-6596
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