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HTM Pham
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20 records found
ALD Tio2 photonic crystals for biosensors
Conference paper -
G. Pandraud
,
E Jardinier
,
HTM Pham
,
P.J. French
,
Pasqualina M Sarro
SiC micromachined Mach-Zehnder interferometer on silicon for pressure sensor
Conference paper -
G. Pandraud
,
L.S. Pakula
,
HTM Pham
,
P.J. French
,
Pasqualina M Sarro
Step coverage of ALD nanolayers on 3D microstructures
Conference paper -
HTM Pham
,
L Constanzo
,
C.R. de Boer
,
Pasqualina M Sarro
Electromechanical optical attenuation in micromachined SiC waveguids
Conference paper -
G. Pandraud
,
H Yang
,
L.S. Pakula
,
HTM Pham
,
P.J. French
,
Pasqualina M Sarro
Straight sidewall controlling of high viscosity SU-8 photoresist patterning using UV lithography
Conference paper -
C Olivadoti
,
HTM Pham
,
Pasqualina M Sarro
Mechanical and structural properties of in-situ doped PECVD SiC layers for post-processing surface micromachining.
Conference paper -
HTM Pham
,
CR de Boer
,
C. Kwakernaak
,
W.G. Sloof
,
Pasqualina M Sarro
Atomic layer deposition TiO2 photonic crystal waveguide of biosensors,
Conference paper -
G. Pandraud
,
E Jardinier
,
HTM Pham
,
P.J. French
,
Pasqualina M Sarro
PECVD SIC RIB channel waveguides loss and passive devices
Conference paper -
G. Pandraud
,
HTM Pham
,
Pasqualina M Sarro
,
P.J. French
Nano particle filtration module for lap on a chips devices
Conference paper -
C. Shen
,
HTM Pham
,
Pasqualina M Sarro
Pressure sensor for automotive applications
Conference paper -
L.S. Pakula
,
H Yang
,
HTM Pham
,
P.J. French
,
Pasqualina M Sarro
LPCVD amorphous SiCx for freestanding electron transparent windows
Conference paper -
B. Morana
,
J.F. Creemer
,
F. Santagata
,
C.C Fan
,
HTM Pham
,
G. Pandraud
,
F.D. Tichelaar
,
Pasqualina M Sarro
Roughness treatment of silicon surface after Deep Reactive Ion Etching
Conference paper -
HTM Pham
,
C.R. de Boer
,
Pasqualina M Sarro
An ammonia sensor based on porous SiC
Conference paper -
E Connolly
,
B Timmer
,
HTM Pham
,
J. Groeneweg
,
Pasqualina M Sarro
,
W Olthuis
,
P.J. French
Very thin SiC membranes for micromachines vacuum sensors
Conference paper -
HTM Pham
,
C Fan
,
G. Pandraud
,
J.F. Creemer
,
N.M. van der Pers
,
P Visser
,
K Kwakernaak
,
Pasqualina M Sarro
Al-Si thermal linear motor for high thermal bandwith
Conference paper -
SL Paalvast
,
HTM Pham
,
J.W. Spronck
,
R.H. Munnig Schmidt
,
Pasqualina M Sarro
Fabrication of a CMOS compatible vertical accelerometer
Conference paper -
L.S. Pakula
,
H Yang
,
HTM Pham
,
Pasqualina M Sarro
,
P.J. French
Electrical and optical properties of PECVD SiC thin films for surface micromachined devices
Conference paper -
HTM Pham
,
T Akkaya
,
C.R. de Boer
,
C.C.G. Visser
,
Pasqualina M Sarro
Deterministic Ratchets for Particle Separation Fabricated With Si MEMS Technology
Conference paper -
HTM Pham
,
T Kulrattanarak
,
RGM van der Sman
,
CGPH Schroën
,
RM Boom
,
Pasqualina M Sarro
PECVD SiC optical waveguide loss and mode characteristics
Journal article -
G. Pandraud
,
HTM Pham
,
P.J. French
,
Pasqualina M Sarro
Robust wafer-level thin-film encapsulation of Microstructures using low stress PECVD silicon carbide
Conference paper -
V. Rajaraman
,
L.S. Pakula
,
HTM Pham
,
Pasqualina M Sarro
,
P.J. French