76 records found
1
Micromachined nanofiltration modules for lab-on-a-chip applications
Enhancing the wettability of high aspect-ratio through-silicon vias lined with LPCVD silicon nitride of PE-ALD titanium nitride for void-free bottom-up copper electroplating
Mixed motion in deterministic ratchets due to anisotropic permeability
Characterization of AlN thin films sputtered on Al Ti electrodes for piezoelectric devices
Nano particle filtration module for lap on a chips devices
Thermal hard disk drive micro actuator for improved tracking performance
Influence of seed layer on crystallity and orientation of pulsed
LPCVD amorphous SiCx for freestanding electron transparent windows
Deterministic Ratchets for Particle Separation Fabricated With Si MEMS Technology
A Multifunctional Vertical Microsieve for Micro and Nano Particles Separation
Robust wafer-level thin-film encapsulation of Microstructures using low stress PECVD silicon carbide
Design and fabrication of an Al2O3 nanolayer as evanescent waveguide sensor for biomedical application
Characterization of AlN thin films sputtered on Al/Ti electrodes for piezoelectric devices
Atomic layer deposition TiO2 photonic crystal waveguide of biosensors
Atomic layer deposition of TiO2 photonic crystal waveguide biosensors
Aluminum thermal motor for high bandwidth positioning stages
Fast response thermal linear motor with reduced power consumption.
Alignment insensitive anisotropic etching of silicon cavities with smooth 49° sidewalls
Oxidized ALD-deposited titanium nitride films as a low-temperature alternative for enhancing the wettability of through-silicon vias
Application of PECVD a-SiC thin-film layer for encapsulation of microstructures