In-situ doped PECVD SiC for surface micromachined devices
Conference Paper
(2002)
Author(s)
CR de Boer (TU Delft - Electrical Engineering, Mathematics and Computer Science)
L Pakula (TU Delft - Electrical Engineering, Mathematics and Computer Science)
PM Sarro (TU Delft - Electrical Engineering, Mathematics and Computer Science)
TMH Pham (TU Delft - Electrical Engineering, Mathematics and Computer Science)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:783db16d-e5a8-4db6-a84e-798f9246c2ae
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Publication Year
2002
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
232-235
Publisher
Czech Technical University in Prague
Event
Eurosensors XVI, Praha, Czech Republik (2002-09-15 - 2002-09-18), Praha, Czech Republik
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