Absolute interferometric surface profiling with 1 Å accuracy

Report (2003)

Authors

ML Krieg ImPhys/Optics - AS
O.A. Soloviev Electronic Instrumentation - EEMCS
Research Group
ImPhys/Optics (AS) (TU Delft)
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Published Date

2003

Language

Undefined/Unknown

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics