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M
ML Krieg
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Authored
12 records found
Fast sampling multiplex detector for a hetrodyne interferometer with angstrom precision
Journal article -
O.A. Soloviev
,
Gleb Vdovin
,
ML Krieg
Absolute heterdyne interferometer for strongly aspherical mirrors
Doctoral thesis -
ML Krieg
Characterization of the Frequency Modulated Continuous Wave Subsystem of an Angstrom Accuracy Absolute Interferometer
Conference paper -
ML Krieg
,
BL Swinkels
,
J.J.M. Braat
Lithografische spiegels meten met subnanonauwkeurigheid
Journal article -
ML Krieg
Lithographic mirrors measured with sub-nanometre accuracy
Journal article -
ML Krieg
Absolute optical path difference measurement with angstrom accuracy over ranges of millimetres.
Conference paper -
ML Krieg
,
RG Klaver
,
J.J.M. Braat
CMOS translinear implementation of the lock-in pixel
Conference paper -
O.A. Soloviev
,
Gleb Vdovin
,
ML Krieg
Absolute interferometric surface profiling with 1 Å accuracy
Report -
ML Krieg
,
O.A. Soloviev
Three-wavelength Laser Light source for absolute, sub-Angstrom, two point source interferometer
Journal article -
ML Krieg
,
GOF Parikesit
,
J.J.M. Braat
Measurements from a novel interferometer for EUVL mirror substrates
Journal article -
ML Krieg
,
J.J.M. Braat
Interferometer for extreme-UV Lithograpgy mirrors aims for 0.1-nm accuracy
Journal article -
ML Krieg
Measuring absolute optical path differences with angstrom accuracy over ranges of millimeters.
Conference paper -
RG Klaver
,
ML Krieg
,
J.J.M. Braat