Interferometer for extreme-UV Lithograpgy mirrors aims for 0.1-nm accuracy
Journal Article
(2005)
Author(s)
ML Krieg (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:6057012c-4f34-411c-88fd-beae238fd6b5
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Publication Year
2005
Research Group
ImPhys/Optics
Volume number
Feb/March
Pages (from-to)
68-68
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