Lithographic mirrors measured with sub-nanometre accuracy
Journal Article
(2004)
Author(s)
ML Krieg (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:7c70600f-66b6-4b9a-80ad-87da718836a5
More Info
expand_more
expand_more
Publication Year
2004
Research Group
ImPhys/Optics
Volume number
2004.4
Pages (from-to)
17-22
No files available
Metadata only record. There are no files for this record.