Al/Si contacting of ultra-shallow epitaxially grown SI and SiGe junctions
Journal Article
(2001)
Author(s)
Q Ren (TU Delft - Old - EWI Sect. ECTM)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
C.C.G. Visser (TU Delft - Electronic Components, Technology and Materials)
JW Slotboom (TU Delft - Electronic Components, Technology and Materials)
Research Group
Old - EWI Sect. ECTM
To reference this document use:
https://resolver.tudelft.nl/uuid:17f24857-0103-404e-af9a-317c054f3532
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Publication Year
2001
Research Group
Old - EWI Sect. ECTM
Volume number
12
Pages (from-to)
313-316
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