Novel contacts and diodes for advanced silicon technology

Al/Si contacting of ultra-shallow epitaxially grown SI and SiGe junctions

Epitaxy and device behaviour of collector-up SiGe HBTs with a partial p-type collector

Metal/silicon Schottky barrier lowering by RTCVD interface passivation

Elimination of TED and base leakage in collector-up SIGE HBT's

Al/Si contacting of ultra-shallow epitaxially grown Si and SiGe junctions

Current transport in ultra-shallow abrupt Si and SiGe diodes

Application of excimer laser annealing in the formation of implanted shallow junctions

Al contacts to very shallow junctions

Potential use of laser annealing in semiconductor processing [op CD-Rom verschenen]

Doping of polysilicon emitters by excimer laser-annealing [niet eerder gehonoreerd]