RJM Mallee | TU Delft Repository

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RJM Mallee

Conference paper (4)

4 records found

1

Application of excimer laser annealing in the formation of implanted shallow junctions

Conference paper (1999) - LK Nanver (author) , EJG Goudena (author) , Q Ren (author) , MR van den Berg (author) , RJM Mallee (author) , JHCM Slabbekoorn (author)

Ultra-low-temperature low-ohmic contacts for SOA applications

Conference paper (1999) - L. K. Nanver (author) , Henk van van Zeijl (author) , H. Schellevis (author) , RJM Mallee (author) , JHCM Slabbekoorn (author) , R Dekker (author) , JW Slotboom (author)

Potential use of laser annealing in semiconductor processing [op CD-Rom verschenen]

Conference paper (1999) - LK Nanver (author) , Q Ren (author) , LCM van Oever (author) , RJM Mallee (author) , JHCM Slabbekoorn (author) , GJ Bertens (author) , EJG Goudena (author) , MR van den Berg (author) , H. Schellevis (author) , Henk van Van Zeijl (author) , T.L.M. Scholtes (author)

Doping of polysilicon emitters by excimer laser-annealing [niet eerder gehonoreerd]

Conference paper (1998) - MR van den Berg (author) , LK Nanver (author) , Q Ren (author) , C.C.G. Visser (author) , RJM Mallee (author) , JW Slotboom (author)