Application of excimer laser annealing in the formation of implanted shallow junctions

Conference paper (1999)

Authors

L.K. Nanver Electronic Components, Technology and Materials -

E.J.G. Goudena Electronic Components, Technology and Materials -

Q Ren Old - EWI Sect. ECTM

MR van den Berg Electronic Components, Technology and Materials -

RJM Mallee Electronic Components, Technology and Materials -

JHCM Slabbekoorn Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

More Info

expand_more

To reference this document use:

http://resolver.tudelft.nl/uuid:e957f715-d1de-4df4-bc71-5e04aee9f057

Published Date

1999

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials