Application of excimer laser annealing in the formation of implanted shallow junctions
Conference Paper
(1999)
Author(s)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
EJG Goudena (TU Delft - Electronic Components, Technology and Materials)
Q Ren (TU Delft - Old - EWI Sect. ECTM)
MR van den Berg (TU Delft - Electronic Components, Technology and Materials)
RJM Mallee (TU Delft - Electronic Components, Technology and Materials)
JHCM Slabbekoorn (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:e957f715-d1de-4df4-bc71-5e04aee9f057
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Publication Year
1999
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
171-178
ISBN (print)
1-56677-232-X
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