Doping of polysilicon emitters by excimer laser-annealing [niet eerder gehonoreerd]

Conference Paper (1998)
Author(s)

MR van den Berg (TU Delft - Electronic Components, Technology and Materials)

L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)

Q Ren (TU Delft - Old - EWI Sect. ECTM)

C.C.G. Visser (TU Delft - Electronic Components, Technology and Materials)

RJM Mallee (TU Delft - Electronic Components, Technology and Materials)

JW Slotboom (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
1998
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
27-30

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