Doping of polysilicon emitters by excimer laser-annealing [niet eerder gehonoreerd]
Conference Paper
(1998)
Author(s)
MR van den Berg (TU Delft - Electronic Components, Technology and Materials)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Q Ren (TU Delft - Old - EWI Sect. ECTM)
C.C.G. Visser (TU Delft - Electronic Components, Technology and Materials)
RJM Mallee (TU Delft - Electronic Components, Technology and Materials)
JW Slotboom (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:76aff214-de01-41e0-976b-faa509485be8
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Publication Year
1998
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
27-30
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