Al/Si contacting of ultra-shallow epitaxially grown Si and SiGe junctions
Conference Paper
(2000)
Author(s)
Q Ren (TU Delft - Old - EWI Sect. ECTM)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
C.C.G. Visser (TU Delft - Electronic Components, Technology and Materials)
JW Slotboom (TU Delft - Electronic Components, Technology and Materials)
Research Group
Old - EWI Sect. ECTM
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https://resolver.tudelft.nl/uuid:ddf6af8b-a98f-4fb2-893c-efcf4df3033a
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Publication Year
2000
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
97-101
ISBN (print)
1-86125-129-7
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