Metal/silicon Schottky barrier lowering by RTCVD interface passivation
Conference Paper
(2000)
Author(s)
Q Ren (TU Delft - Old - EWI Sect. ECTM)
WD van Noort (TU Delft - Electronic Components, Technology and Materials)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
JW Slotboom (TU Delft - Electronic Components, Technology and Materials)
Research Group
Old - EWI Sect. ECTM
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Publication Year
2000
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
161-166
ISBN (print)
1-56677-274-5
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