Current transport in ultra-shallow abrupt Si and SiGe diodes
Conference Paper
(2000)
Author(s)
Q Ren (TU Delft - Old - EWI Sect. ECTM)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
JW Slotboom (TU Delft - Electronic Components, Technology and Materials)
Research Group
Old - EWI Sect. ECTM
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https://resolver.tudelft.nl/uuid:2f5cbf24-0ab8-42aa-a845-f84ab78ff7c9
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Publication Year
2000
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
1-8
ISBN (print)
90-73461-24-3
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