Al contacts to very shallow junctions
Conference Paper
(1999)
Author(s)
Q Ren (TU Delft - Old - EWI Sect. ECTM)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
C.C.G. Visser (TU Delft - Electronic Components, Technology and Materials)
JW Slotboom (TU Delft - Electronic Components, Technology and Materials)
Research Group
Old - EWI Sect. ECTM
To reference this document use:
https://resolver.tudelft.nl/uuid:56e81155-af3e-45ca-83dc-ba5e66eecef0
More Info
expand_more
expand_more
Publication Year
1999
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
719-722
ISBN (print)
90-73461-18-9
No files available
Metadata only record. There are no files for this record.