Novel contacts and diodes for advanced silicon technology

Al/Si contacting of ultra-shallow epitaxially grown SI and SiGe junctions

Epitaxy and device behaviour of collector-up SiGe HBTs with a partial p-type collector

Current transport in ultra-shallow abrupt Si and SiGe diodes

Al/Si contacting of ultra-shallow epitaxially grown Si and SiGe junctions

Metal/silicon Schottky barrier lowering by RTCVD interface passivation

Elimination of TED and base leakage in collector-up SIGE HBT's

Al contacts to very shallow junctions

Application of excimer laser annealing in the formation of implanted shallow junctions

Potential use of laser annealing in semiconductor processing [op CD-Rom verschenen]

Doping of polysilicon emitters by excimer laser-annealing [niet eerder gehonoreerd]