High Pressure Aluminium for Submicron Vias using a Liquid Transducer
Journal Article
(1997)
Author(s)
JF Jongste (External organisation)
X. Li (External organisation)
JP Lokker (TU Delft - QN/Fysics of NanoElectronics)
Guido Janssen (TU Delft - OLD Metals Processing, Microstructures and Properties)
S Radelaar (TU Delft - OLD Metals Processing, Microstructures and Properties)
Research Group
QN/Fysics of NanoElectronics
To reference this document use:
https://resolver.tudelft.nl/uuid:180d50a2-8e8e-4884-8ca3-7549e2301399
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Publication Year
1997
Research Group
QN/Fysics of NanoElectronics
Volume number
37/38
Pages (from-to)
319-327
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