Chemical Vapor Deposition of Gallium on Silicon and SiO2

Sammak, A.; de Boer, W.B.; Nanver, L. K.; Qi, L; Lorito, G.

Chemical Vapor Deposition of Gallium on Silicon and SiO2

Conference paper (2009)

Authors

A. Sammak Electronic Components, Technology and Materials

W.B. de Boer Old - EWI Sect. ECTM

L. K. Nanver Electronic Components, Technology and Materials

L Qi External organisation

G. Lorito Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2009

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Research Group

Electronic Components, Technology and Materials

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